Excimer laser annealing: An alternative route and its optimisation to effectively activate Si dopants in AlN films grown by plasma assisted molecular beam epitaxy - ScienceDirect
Excimer Laser Annealing System | JSW Aktina System Co., Ltd.
Micromachines | Free Full-Text | Evaluation of Crystalline Volume Fraction of Laser-Annealed Polysilicon Thin Films Using Raman Spectroscopy and Spectroscopic Ellipsometry
Transient Laser-Annealing-Induced Mesophase Transitions of Block Copolymer–Resol Thin Films | ACS Polymers Au
The effects of laser annealing ambient and the number of laser shots on the morphology of polyâ•'si films
Schematic diagram of the Excimer Laser Annealing system. | Download Scientific Diagram
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The Digital Display Revolution: Built on Excimer Laser Annealing
Properties of Poly-Si Thin films and Their Transistors Fabricated Using Selective Excimer Laser Annealing | Semantic Scholar
The excimer laser annealing principle (left) and the resulting... | Download Scientific Diagram
High energy excimer laser system for nanosecond annealing of semiconductor devices
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Excimer Laser Annealing System | JSW Aktina System Co., Ltd.
Excimer Laser Annealing Makes Better Flat Panel Displays | Coherent
Excimer Laser Annealing Makes Better Flat Panel Displays | Coherent
Solid State Laser Annealing for OLED Display - INNOVAVENT Laseroptics
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FLA and PLA 2 - Helmholtz-Zentrum Dresden-Rossendorf, HZDR
LTPS Thin-Film Transistors Fabricated Using New Selective Laser Annealing System | Semantic Scholar
Energies | Free Full-Text | Crystallization of Amorphous Silicon via Excimer Laser Annealing and Evaluation of Its Passivation Properties